statistics Estimate the mean and standard deviation of the process

| January 30, 2017

Question
A TiW layer is deposited on a substrate using a sputtering tool. Table 6E.13 contains layer thickness measurements (in Angstroms) on 20 subgroups of four substrates.

(a) Set up .transtutors.com/qimage/image09062014651.png” alt=” width=”>and Rcontrol charts on this process. Is the process in control? Revise the control limits as necessary.

(b) Estimate the mean and standard deviation of the process.

(c) Is the layer thickness normally distributed?

(d) If the specifications are at 450 ??30, estimate the process capability.

TABLE 6 E .1 3

Layer Thickness Data for Exercise 6.26

Subgroup

x1

x2

x3

x4

1

459

449

435

450

2

443

440

442

442

3

457

444

449

444

4

469

463

453

438

5

443

457

445

454

6

444

456

456

457

7

445

449

450

445

8

446

455

449

452

9

444

452

457

440

10

432

463

463

443

11

445

452

453

438

12

456

457

436

457

13

459

445

441

447

14

441

465

438

450

15

460

453

457

438

16

453

444

451

435

17

451

460

450

457

18

422

431

437

429

19

444

446

448

467

20

450

450

454

454

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