semiconductor fabrication plant

| July 18, 2016

An experiment was run in a semiconductor fabrication plant in an effort to increase yield. Five factors, each at two levels, were studied. The factors (and levels) were = aperture setting (small, large), = exposure time (20% below nominal, 20% above nominal), = development time (30 and 45 seconds), = mask dimension (small, large), and = etch time (14.5 and 15.5 minutes). The following un-replicated 25design was run:

Suppose that a center point had been run (replicated five times) and the responses were 45, 40, 41, 47, and 43.

(a) Estimate the experimental error using the center points. Compare this to the estimate obtained originally by pooling apparently non significant effects.

(b) Test for look of fit, using α = 0.05.

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